A Valve-less Micro Pump with Pzt Diaphragm
نویسندگان
چکیده
ABSTRACT This paper proposes a new valveless pump using a PZT diaphragm to create a gas jet flow for fluidic applications. The pump was designed and simulated based on transient fluidic analysis with experimental result of PZT diaphragm so that the features of micropump are reliably predicted. The experimental results of a PMMA prototype confirmed the performance of the pump. The fabrication process of the silicon-based model was also introduced and the silicon pump was achieved.
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